Conformality analysis of the archetypical Al2O3 ALD process in 3 rd generation silicon based microscopic lateral high aspect ratio test structures

Research output: Contribution to conferencePosterScientific

Original languageEnglish
Publication statusAccepted/In press - 17 Jul 2019
MoE publication typeNot Eligible
EventEurope-Korea Conference on Science and Technology - Vienna, Austria
Duration: 15 Jul 201919 Jul 2019
https://www.ekc2019.org/page/ekc2019/ekc

Conference

ConferenceEurope-Korea Conference on Science and Technology
Abbreviated titleEKC
CountryAustria
CityVienna
Period15/07/201919/07/2019
Internet address

Keywords

  • ALD
  • Conformality
  • Heterogeneous catalyst

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