Conformality analysis of the archetypical Al2O3 ALD process in 3 rd generation silicon based microscopic lateral high aspect ratio test structures

Jihong Yim

Conformality analysis of the archetypical Al2O3 ALD process in 3 rd generation silicon based microscopic lateral high aspect ratio test structures

Research output: Contribution to conference › Poster › Scientific

Original language	English
Publication status	Accepted/In press - 17 Jul 2019
MoE publication type	Not Eligible
Event	Europe-Korea Conference on Science and Technology - Vienna, Austria Duration: 15 Jul 2019 → 19 Jul 2019 https://www.ekc2019.org/page/ekc2019/ekc

Conference

Conference	Europe-Korea Conference on Science and Technology
Abbreviated title	EKC
Country/Territory	Austria
City	Vienna
Period	15/07/2019 → 19/07/2019
Internet address	https://www.ekc2019.org/page/ekc2019/ekc

Keywords

ALD
Conformality
Heterogeneous catalyst

Cite this

@conference{0063cae217994d928e50b3620a05d5fa,

title = "Conformality analysis of the archetypical Al2O3 ALD process in 3 rd generation silicon based microscopic lateral high aspect ratio test structures",

keywords = "ALD, Conformality, Heterogeneous catalyst",

author = "Jihong Yim",

year = "2019",

month = jul,

day = "17",

language = "English",

note = "Europe-Korea Conference on Science and Technology, EKC ; Conference date: 15-07-2019 Through 19-07-2019",

url = "https://www.ekc2019.org/page/ekc2019/ekc",

}

TY - CONF

T1 - Conformality analysis of the archetypical Al2O3 ALD process in 3 rd generation silicon based microscopic lateral high aspect ratio test structures

AU - Yim, Jihong

PY - 2019/7/17

Y1 - 2019/7/17

KW - ALD

KW - Conformality

KW - Heterogeneous catalyst

M3 - Poster

T2 - Europe-Korea Conference on Science and Technology

Y2 - 15 July 2019 through 19 July 2019

ER -