Conformal Zn-Benzene Dithiol Thin Films for Temperature-Sensitive Electronics Grown via Industry-Feasible Atomic/Molecular Layer Deposition Technique

Anish Philip, Topias Jussila, Jorit Obenlüneschloß, David Zanders, Florian Preischel, Jussi Kinnunen, Anjana Devi, Maarit Karppinen^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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UniEn-MLD: Unique ALD/MLD-Enabled Material Functions
Karppinen, M. (Principal investigator), Ghazy, A. (Project Member), Kousar, S. (Project Member), Jussila, T. (Project Member), Philip, A. (Project Member), Sederholm, L. (Project Member), Pekkanen, J. (Project Member), Francis, M. (Project Member), Partanen, O. (Project Member) & Madadi, M. (Project Member)
01/06/2023 → 31/05/2028
Project: EU: ERC grants