Computational fluid dynamics study of the atomic layer deposition process around cylindrical and planar configurations

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ALDI: Reactive flow in porous media: modelling and experiments in atomic layer deposition context
Puurunen, R. (Principal investigator), Miikkulainen, V. (Project Member), Yim, J. (Project Member), Velasco, J. (Project Member), Salakka, T. (Project Member), Revitzer, H. (Project Member), Gonsalves, C. (Project Member), Andsten, S. (Project Member), Larkiala, S. (Project Member), Nortes, M. (Project Member), Salminen, J. (Project Member), Ossama, M. (Project Member), Järvilehto, J. (Project Member) & Vuorinen, V. (Co-PI)
01/09/2020 → 31/08/2024
Project: RCF Academy Project
-: Reactive flow in porous media: modelling and experiments in atomic layer deposition context
Vuorinen, V. (Principal investigator), Kannan, J. (Project Member), Karimkashi Arani, S. (Project Member), Rintanen, A. (Project Member), Tamadonfar, P. (Project Member) & Ersavas Isitman, G. (Project Member)
01/09/2020 → 31/08/2024
Project: Academy of Finland: Other research funding

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