Projects per year
Abstract
Computational fluid dynamics (CFD) simulations were used to model atomic layer deposition (ALD) coating processes in the continuum flow regime. CFD model was validated for non-reactive and reactive flows. In ALD CFD simulations, surfaces in various test cases were considered as non-porous aluminum oxide. The effect of trimethylaluminium precursor partial pressure, initial condition, and Reynolds number (Re) on coating timescale were analyzed. The CFD model accurately captured the surface coverage solution for all cases when the domain was initially filled with the precursor. The absence of initial precursor delayed coating time during the surface concentration level development process. As Re increased, coating time significantly decreased due to reduced diffusion limitations and promoted convection swiftly transporting precursors to the surfaces. The provided example showed that 2D polydisperse fixed cylinder bed is fully coated within approximately one flow time through the bed. The benefits of CFD in understanding ALD processes were discussed.
Original language | English |
---|---|
Article number | 118862 |
Number of pages | 13 |
Journal | Chemical Engineering Science |
Volume | 277 |
DOIs | |
Publication status | Published - 5 Aug 2023 |
MoE publication type | A1 Journal article-refereed |
Keywords
- ALD surface coating process modeling
- Atomic layer deposition (ALD)
- Computational fluid dynamics (CFD)
- Fixed-bed reactor
- Open source
Fingerprint
Dive into the research topics of 'Computational fluid dynamics study of the atomic layer deposition process around cylindrical and planar configurations'. Together they form a unique fingerprint.Projects
- 2 Finished
-
-: Reactive flow in porous media: modelling and experiments in atomic layer deposition context
Vuorinen, V. (Principal investigator)
01/09/2020 → 31/08/2024
Project: Academy of Finland: Other research funding
-
ALDI: Reactive flow in porous media: modelling and experiments in atomic layer deposition context
Puurunen, R. (Principal investigator)
01/09/2020 → 31/08/2024
Project: Academy of Finland: Other research funding