Compressible squeeze-films in vibrating MEMS structures at high frequencies

Timo Veijola

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publicationDesign, Test, Integration and Packaging of MESMS/MOEMS, Rome, Italy, 1-3 April, 2009
    Place of PublicationRome, Italy
    Pages235-238
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication

    Keywords

    • compressible squeeze-film
    • MEMS
    • squeeze-film damper

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