Compressible squeeze-films in vibrating MEMS structures at high frequencies

Timo Veijola

Compressible squeeze-films in vibrating MEMS structures at high frequencies

Timo Veijola

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Design, Test, Integration and Packaging of MESMS/MOEMS, Rome, Italy, 1-3 April, 2009
Place of Publication	Rome, Italy
Pages	235-238
Publication status	Published - 2009
MoE publication type	A4 Article in a conference publication

Keywords

compressible squeeze-film
MEMS
squeeze-film damper

Cite this

@inproceedings{2562d02e1b54481b906935c5f352a6f1,

title = "Compressible squeeze-films in vibrating MEMS structures at high frequencies",

keywords = "compressible squeeze-film, MEMS, squeeze-film damper, compressible squeeze-film, MEMS, squeeze-film damper, compressible squeeze-film, MEMS, squeeze-film damper",

author = "Timo Veijola",

year = "2009",

language = "English",

isbn = "978-2-35500-009-6",

pages = "235--238",

booktitle = "Design, Test, Integration and Packaging of MESMS/MOEMS, Rome, Italy, 1-3 April, 2009",

}

TY - GEN

T1 - Compressible squeeze-films in vibrating MEMS structures at high frequencies

AU - Veijola, Timo

PY - 2009

Y1 - 2009

KW - compressible squeeze-film

KW - MEMS

KW - squeeze-film damper

KW - compressible squeeze-film

KW - MEMS

KW - squeeze-film damper

KW - compressible squeeze-film

KW - MEMS

KW - squeeze-film damper

M3 - Conference contribution

SN - 978-2-35500-009-6

SP - 235

EP - 238

BT - Design, Test, Integration and Packaging of MESMS/MOEMS, Rome, Italy, 1-3 April, 2009

CY - Rome, Italy

ER -