Composition and thickness determination of thin oxide films: Comparison of different programs and methods

V. Sammelselg, J. Aarik, A. Aidla, A. Kasikov, E. Heikinheimo, M. Peussa, L. Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    36 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)523-527
    JournalJournal of Analytical Atomic Spectrometry
    Publication statusPublished - 1999
    MoE publication typeA1 Journal article-refereed


    • ellipsometry
    • EPMA
    • film thickness and composition
    • optical spectrophotometry
    • profilometry
    • XRF

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