Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

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Original languageEnglish
Pages (from-to)224-227
JournalMaterials Science and Engineering B: Advanced Functional Solid-State Materials
Volume159-160
Issue numberC
Publication statusPublished - 2009
MoE publication typeA1 Journal article-refereed

    Research areas

  • Boron; Gettering, Ion implantation, Iron, Relaxation, Silicon

ID: 3601593