@article{bdd30cb9efae4cb38933a0cb608c4c18,
title = "Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon",
keywords = "Boron; Gettering, Ion implantation, Iron, Relaxation, Silicon, Boron; Gettering, Ion implantation, Iron, Relaxation, Silicon, Boron; Gettering, Ion implantation, Iron, Relaxation, Silicon",
author = "Asghar, \{M. I.\} and M. Yli-Koski and H. Savin and A. Haarahiltunen and H. Talvitie and Juha Sinkkonen",
year = "2009",
language = "English",
volume = "159-160",
pages = "224--227",
journal = "Materials Science and Engineering B: Advanced Functional Solid-State Materials",
issn = "1873-4944",
publisher = "Elsevier",
number = "C",
}