Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

M. I. Asghar, M. Yli-Koski, H. Savin, A. Haarahiltunen, H. Talvitie, J. Sinkkonen

    Research output: Contribution to journalArticleScientificpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)224-227
    JournalMaterials Science and Engineering B: Advanced Functional Solid-State Materials
    Volume159-160
    Issue numberC
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Boron; Gettering
    • Ion implantation
    • Iron
    • Relaxation
    • Silicon

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