Comparison of stabilizing treatments on porous silicon for sensor applications

Mikko Björkqvist, Jarno Salonen, Ensio Laine, Lauri Niinistö

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2002
    MoE publication typeD4 Published development or research report or study

    Publication series

    NamePorous Semiconductors - Science and Technology, Puerto de la Cruz, Tenerife, Spain, 10-15.3.2002.
    PublisherTechnical University of Valencia, Spain; University

    Keywords

    • dodecene
    • gas sensors
    • porous silicon
    • thermal carbonization
    • thermal nitridization
    • thermal oxidation

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