@article{7e2efbcefa304a908b8c1b30708dee08,
title = "Comparison of some coating techniques to fabricate barrier layers on packaging materials",
keywords = "aluminum oxide, atomic layer deposition, barrier coating, electron beam evaporation, magnetron sputtering, sol-gel, aluminum oxide, atomic layer deposition, barrier coating, electron beam evaporation, magnetron sputtering, sol-gel, aluminum oxide, atomic layer deposition, barrier coating, electron beam evaporation, magnetron sputtering, sol-gel",
author = "Terhi Hirvikorpi and Mika V{\"a}h{\"a}-Nissi and Ali Harlin and Maarit Karppinen",
year = "2010",
doi = "10.1016/j.tsf.2010.04.018",
language = "English",
volume = "518",
pages = "5463--5466",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "19",
}