Comparison of some coating techniques to fabricate barrier layers on packaging materials

Terhi Hirvikorpi, Mika Vähä-Nissi, Ali Harlin, Maarit Karppinen

    Research output: Contribution to journalArticleScientificpeer-review

    62 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)5463-5466
    JournalThin Solid Films
    Volume518
    Issue number19
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA1 Journal article-refereed

    Keywords

    • aluminum oxide
    • atomic layer deposition
    • barrier coating
    • electron beam evaporation
    • magnetron sputtering
    • sol-gel

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