Abstract
The mechanical properties of the diamondlike coatings deposited with mass-separated C+, CH+ 3, CH+ 4, and C2H+ 2 ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C+ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.
Original language | English |
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Pages (from-to) | 132-134 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 50 |
Issue number | 3 |
DOIs | |
Publication status | Published - 1987 |
MoE publication type | A1 Journal article-refereed |