Comparison of diamondlike coatings deposited with C+ and various hydrocarbon ion beams

A. Anttila; J. Koskinen; R. Lappalainen; J. P. Hirvonen; D. Stone; C. Paszkiet

doi:10.1063/1.97693

Comparison of diamondlike coatings deposited with C⁺ and various hydrocarbon ion beams

A. Anttila^*, J. Koskinen, R. Lappalainen, J. P. Hirvonen, D. Stone, C. Paszkiet

^*Corresponding author for this work

Not published at Aalto University

Research output: Contribution to journal › Article › Scientific › peer-review

53 Citations (Scopus)

Abstract

The mechanical properties of the diamondlike coatings deposited with mass-separated C⁺, CH⁺ ₃, CH⁺ ₄, and C₂H⁺ ₂ ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C⁺ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.

Original language	English
Pages (from-to)	132-134
Number of pages	3
Journal	Applied Physics Letters
Volume	50
Issue number	3
DOIs	https://doi.org/10.1063/1.97693
Publication status	Published - 1987
MoE publication type	A1 Journal article-refereed

Access to Document

10.1063/1.97693

Link to publication in Scopus

Fingerprint Dive into the research topics of 'Comparison of diamondlike coatings deposited with C<sup>+</sup> and various hydrocarbon ion beams'. Together they form a unique fingerprint.

Cite this

@article{36c6d7de1c3848f398373a127c14f437,

title = "Comparison of diamondlike coatings deposited with C+ and various hydrocarbon ion beams",

abstract = "The mechanical properties of the diamondlike coatings deposited with mass-separated C+, CH+ 3, CH+ 4, and C2H+ 2 ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C+ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.",

author = "A. Anttila and J. Koskinen and R. Lappalainen and Hirvonen, {J. P.} and D. Stone and C. Paszkiet",

year = "1987",

doi = "10.1063/1.97693",

language = "English",

volume = "50",

pages = "132--134",

journal = "Applied Physics Letters",

issn = "0003-6951",

number = "3",

}

TY - JOUR

T1 - Comparison of diamondlike coatings deposited with C+ and various hydrocarbon ion beams

AU - Anttila, A.

AU - Koskinen, J.

AU - Lappalainen, R.

AU - Hirvonen, J. P.

AU - Stone, D.

AU - Paszkiet, C.

PY - 1987

Y1 - 1987

N2 - The mechanical properties of the diamondlike coatings deposited with mass-separated C+, CH+ 3, CH+ 4, and C2H+ 2 ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C+ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.

AB - The mechanical properties of the diamondlike coatings deposited with mass-separated C+, CH+ 3, CH+ 4, and C2H+ 2 ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C+ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.

UR - http://www.scopus.com/inward/record.url?scp=34547308344&partnerID=8YFLogxK

U2 - 10.1063/1.97693

DO - 10.1063/1.97693

M3 - Article

AN - SCOPUS:34547308344

VL - 50

SP - 132

EP - 134

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 3

ER -