Comparison of diamondlike coatings deposited with C+ and various hydrocarbon ion beams

A. Anttila; J. Koskinen; Reijo Lappalainen; J. P. Hirvonen; D. Stone; C. Paszkiet

doi:10.1063/1.97693

Comparison of diamondlike coatings deposited with C⁺ and various hydrocarbon ion beams

A. Anttila^*, J. Koskinen, Reijo Lappalainen, J. P. Hirvonen, D. Stone, C. Paszkiet

^*Corresponding author for this work

Not published at Aalto University

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Abstract

The mechanical properties of the diamondlike coatings deposited with mass-separated C⁺, CH⁺ ₃, CH⁺ ₄, and C₂H⁺ ₂ ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C⁺ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.

Original language	English
Pages (from-to)	132-134
Number of pages	3
Journal	Applied Physics Letters
Volume	50
Issue number	3
DOIs	https://doi.org/10.1063/1.97693
Publication status	Published - 1987
MoE publication type	A1 Journal article-refereed

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abstract = "The mechanical properties of the diamondlike coatings deposited with mass-separated C+, CH+ 3, CH+ 4, and C2H+ 2 ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C+ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.",

author = "A. Anttila and J. Koskinen and Reijo Lappalainen and Hirvonen, {J. P.} and D. Stone and C. Paszkiet",

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AU - Stone, D.

AU - Paszkiet, C.

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AB - The mechanical properties of the diamondlike coatings deposited with mass-separated C+, CH+ 3, CH+ 4, and C2H+ 2 ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C+ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.

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Comparison of diamondlike coatings deposited with C⁺ and various hydrocarbon ion beams

Abstract

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