Comparison of diamondlike coatings deposited with C+ and various hydrocarbon ion beams

A. Anttila*, J. Koskinen, Reijo Lappalainen, J. P. Hirvonen, D. Stone, C. Paszkiet

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

54 Citations (Scopus)


The mechanical properties of the diamondlike coatings deposited with mass-separated C+, CH+ 3, CH+ 4, and C2H+ 2 ion beams have been compared. The hardness, abrasive wear resistance, and adhesion of the coatings prepared with the C+ ion beam were superior to those of the coatings prepared with other ions. The most serious drawback of the films prepared with hydrocarbon beams was their brittleness and weak adhesion.

Original languageEnglish
Pages (from-to)132-134
Number of pages3
JournalApplied Physics Letters
Issue number3
Publication statusPublished - 1987
MoE publication typeA1 Journal article-refereed


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