Comparison of Defect Images and Density Between Synchrotron Section Topography and Infrared Light Scattering Microscopy in Heat-Treated Czochralski Silicon Crystals

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • J. Partanen
  • T. Tuomi
  • K. Katayama

Research units

Details

Original languageEnglish
Pages (from-to)599-604
JournalJournal of the Electrochemical Society
Volume139
Publication statusPublished - 1992
MoE publication typeA1 Journal article-refereed

    Research areas

  • silicon, synchrotron radiation

ID: 4957387