Comparison of Defect Images and Density Between Synchrotron Section Topography and Infrared Light Scattering Microscopy in Heat-Treated Czochralski Silicon Crystals

J. Partanen, T. Tuomi, K. Katayama

    Research output: Contribution to journalArticleScientificpeer-review

    6 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)599-604
    JournalJournal of the Electrochemical Society
    Volume139
    Publication statusPublished - 1992
    MoE publication typeA1 Journal article-refereed

    Keywords

    • silicon
    • synchrotron radiation

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