Comparison of contact and contactless CV for thin film oxide characterization

Research output: Contribution to conferencePosterScientific

Original languageEnglish
Publication statusPublished - 22 May 2017
MoE publication typeNot Eligible
EventALTECH EMRS Symposium: Analytical techniques for precise characterization of nano materials - Strasbourg, France
Duration: 22 May 201726 May 2017

Conference

ConferenceALTECH EMRS Symposium
CountryFrance
CityStrasbourg
Period22/05/201726/05/2017

Keywords

  • thin films
  • contactless CV
  • corona oxide characterization of semiconductors

Equipment

OtaNano

Anna Rissanen (Manager)

Aalto University

Facility/equipment: Facility

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