Comparative study on REScO3 thin films - the effect of the RE ionic radius

Pia Myllymäki, Minna Nieminen, Matti Putkonen, Lauri Niinistö, Martin Roeckerath, Jürgen Schubert, Siegfried Mantl

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationAVS 6th International Conference on Atomic Layer Deposition, Seoul Korea, 24.-26.7.2006, Abstract Book,
    Pages56
    Publication statusPublished - 2006
    MoE publication typeA4 Article in a conference publication

    Keywords

    • Atomic layer deposition, rare earth scandates

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