Comparative numerical study of FEM methods solving gas damping in perforated MEMS devices

Giorgio De Pasquale, Timo Veijola

    Research output: Contribution to journalArticleScientificpeer-review

    25 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)517-528
    JournalMicrofluidics and Nanofluidics
    Volume5
    Issue number4
    Publication statusPublished - 2008
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ANSYS
    • FEM modeling
    • gas damping
    • MEMS
    • oscillating plates
    • perforation
    • PPR

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