@article{35d51eed31d04eda875e5b3ff761c7a7,
title = "Comparative numerical study of FEM methods solving gas damping in perforated MEMS devices",
keywords = "ANSYS, FEM modeling, gas damping, MEMS, oscillating plates, perforation, PPR, ANSYS, FEM modeling, gas damping, MEMS, oscillating plates, perforation, PPR, ANSYS, FEM modeling, gas damping, MEMS, oscillating plates, perforation, PPR",
author = "{De Pasquale}, Giorgio and Timo Veijola",
year = "2008",
language = "English",
volume = "5",
pages = "517--528",
journal = "Microfluidics and Nanofluidics",
issn = "1613-4990",
publisher = "Springer",
number = "4",
}