@techreport{5e05cb6d84a04b90810131b23002ff9e,
title = "Comparative measurements of surface topography in thin films",
keywords = "atomic force microscopy, scanning electron microscopy, thin films, atomic force microscopy, scanning electron microscopy, thin films, atomic force microscopy, scanning electron microscopy, thin films",
author = "S. Kallip and J. Niinist{\"o} and V. Sammelselg and E. Lust and L. Niinist{\"o}",
year = "2000",
language = "English",
series = "Nordic-baltic SPM Workshop 2000, Marstrand, Sweden, June 5-7, 2000",
pages = "19",
type = "WorkingPaper",
}