Compact Squeezed-Film Damping Model Including the Open Border Effects

T. Veijola, K. Ruokonen, I. Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationThe 4th International Conference on Modeling and Simulation of Microsystems, 19-21.3.2001, South Carolina, USA
Place of PublicationSouth Carolina, USA
Pages76-79
Publication statusPublished - 2001
MoE publication typeA4 Article in a conference publication

Keywords

  • acoustic impedance
  • damping in microstructures
  • fringe flow
  • Gas damping
  • MEMS
  • Reynolds equation

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