Compact Models for Squeezed-Film Dampers with Inertial Effects

Timo Veijola

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationDTIP of MEMS and MOEMS, Montreux, Switzerland, 12-14 May 2004
    Place of PublicationMontreux, Switzerland
    Pages365-369
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication

    Keywords

    • gas inertia
    • MEMS resonator
    • Reynolds equation
    • squeeze-film

    Cite this