Original language | English |
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Title of host publication | DTIP of MEMS and MOEMS, Montreux, Switzerland, 12-14 May 2004 |
Place of Publication | Montreux, Switzerland |
Pages | 365-369 |
Publication status | Published - 2004 |
MoE publication type | A4 Conference publication |
Keywords
- gas inertia
- MEMS resonator
- Reynolds equation
- squeeze-film