Compact model for a MEM perforation cell with viscous, spring, and inertial forces

Timo Veijola

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)203-219
    JournalMicrofluidics and Nanofluidics
    Volume6
    Issue number2
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

    Keywords

    • equivalent circuit model
    • gas damper
    • MEMS
    • perforation

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