Compact large-displacement model for a capacitive accelerometer

T. Veijola; H. Kuisma; J. Lahdenperä

Compact large-displacement model for a capacitive accelerometer

T. Veijola, H. Kuisma, J. Lahdenperä

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	2nd Int. Conf. on Modeling and Simulation of Microsystems, Puerto Rico, USA, 19-21.4.1999
Place of Publication	USA
Pages	218-221
Publication status	Published - 1999
MoE publication type	A4 Article in a conference publication

Keywords

accelerometer model
electrical equivalencies
gas-film damping
squeeze-film damping

Cite this

@inproceedings{d83e12d30ea8422cbbe9147c6f5fde90,

title = "Compact large-displacement model for a capacitive accelerometer",

keywords = "accelerometer model, electrical equivalencies, gas-film damping, squeeze-film damping, accelerometer model, electrical equivalencies, gas-film damping, squeeze-film damping, accelerometer model, electrical equivalencies, gas-film damping, squeeze-film damping",

author = "T. Veijola and H. Kuisma and J. Lahdenper{\"a}",

year = "1999",

language = "English",

pages = "218--221",

booktitle = "2nd Int. Conf. on Modeling and Simulation of Microsystems, Puerto Rico, USA, 19-21.4.1999",

}

TY - GEN

T1 - Compact large-displacement model for a capacitive accelerometer

AU - Veijola, T.

AU - Kuisma, H.

AU - Lahdenperä, J.

PY - 1999

Y1 - 1999

KW - accelerometer model

KW - electrical equivalencies

KW - gas-film damping

KW - squeeze-film damping

KW - accelerometer model

KW - electrical equivalencies

KW - gas-film damping

KW - squeeze-film damping

KW - accelerometer model

KW - electrical equivalencies

KW - gas-film damping

KW - squeeze-film damping

M3 - Conference contribution

SP - 218

EP - 221

BT - 2nd Int. Conf. on Modeling and Simulation of Microsystems, Puerto Rico, USA, 19-21.4.1999

CY - USA

ER -