Compact large-displacement model for a capacitive accelerometer

T. Veijola, H. Kuisma, J. Lahdenperä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication2nd Int. Conf. on Modeling and Simulation of Microsystems, Puerto Rico, USA, 19-21.4.1999
    Place of PublicationUSA
    Pages218-221
    Publication statusPublished - 1999
    MoE publication typeA4 Article in a conference publication

    Keywords

    • accelerometer model
    • electrical equivalencies
    • gas-film damping
    • squeeze-film damping

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