@article{338285003cb44b1e96901c0403fc2fcc,
title = "Compact Damping Models for Laterally Moving Microstructures with Gas-Rarefaction Effects",
keywords = "damping in microstructures, effective viscosity, gas damping, Knudsen number, MEMS, rarefied Couette flow, damping in microstructures, effective viscosity, gas damping, Knudsen number, MEMS, rarefied Couette flow, damping in microstructures, effective viscosity, gas damping, Knudsen number, MEMS, rarefied Couette flow",
author = "T. Veijola and M. Turowski",
year = "2001",
language = "English",
volume = "10",
pages = "263--272",
journal = "Journal of Microelectromechanical Systems",
issn = "1941-0158",
publisher = "IEEE",
number = "2",
}