Compact Damping Models for Laterally Moving Microstructures with Gas-Rarefaction Effects

T. Veijola, M. Turowski

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationEspoo
    Pages24
    Publication statusPublished - 2000
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameCircuit Theory Laboratory Report Series
    PublisherHelsinki University of Technology, Circuit Theory Laboratory
    No.CT-41
    ISSN (Print)1239-8233

    Keywords

    • damping in microstructures
    • effective viscosity
    • Gas-damping
    • Knudsen number
    • MEMS
    • rarefied Couette flow

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