Compact Damping Models for Laterally Moving Microstructures with Gas-Rarefaction Effects

T. Veijola, M. Turowski

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)263-272
    JournalJournal of Microelectromechanical Systems
    Volume10
    Issue number2
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed

    Keywords

    • damping in microstructures
    • effective viscosity
    • gas damping
    • Knudsen number
    • MEMS
    • rarefied Couette flow

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