Compact damping models for lateral structures including Gas rarefaction effects

T. Veijola

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    12 Citations (Scopus)
    Original languageEnglish
    Title of host publication3rd International Conference on Modeling and simulation of microsystems (MSM)
    Place of PublicationSan Diego, USA
    Pages162-165
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication

    Keywords

    • damping in microstructures
    • effective viscosity
    • Gas damping
    • Knudsen number
    • rarefied Couette flow

    Cite this