Combined photolithography and embossing for fabrication of multilevel, free standing microfluidic structures

Susanna Aura, Sami Franssila

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationInternational Conference of Miniaturized systems for chemistry and life science
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication

Equipment

  • Cite this

    Aura, S., & Franssila, S. (2010). Combined photolithography and embossing for fabrication of multilevel, free standing microfluidic structures. In International Conference of Miniaturized systems for chemistry and life science