Coating of nanoporous membranes atomic layer deposition versus sputtering

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	NanoSmat 2007, Algarve, Portugal 9-11 July
Pages	313-314
Publication status	Published - 2007
MoE publication type	A4 Conference publication

Keywords

@inproceedings{b204ebcb385b48ea8f8f208e096f30c1,

title = "Coating of nanoporous membranes atomic layer deposition versus sputtering",

keywords = "ALD, membrane, porous materials, sputtering, ALD, membrane, porous materials, sputtering, ALD, membrane, porous materials, sputtering",

author = "K. Grigoras and Sari Sirvi{\"o} and V-M Airaksinen and S. Franssila",

year = "2007",

language = "English",

pages = "313--314",

booktitle = "NanoSmat 2007, Algarve, Portugal 9-11 July",

}

TY - GEN

T1 - Coating of nanoporous membranes atomic layer deposition versus sputtering

AU - Grigoras, K.

AU - Sirviö, Sari

AU - Airaksinen, V-M

AU - Franssila, S.

PY - 2007

Y1 - 2007

KW - ALD

KW - membrane

KW - porous materials

KW - sputtering

KW - ALD

KW - membrane

KW - porous materials

KW - sputtering

KW - ALD

KW - membrane

KW - porous materials

KW - sputtering

M3 - Conference article in proceedings

SP - 313

EP - 314

BT - NanoSmat 2007, Algarve, Portugal 9-11 July

ER -