Coating of nanoporous membranes: atomic layer deposition versus sputtering

K. Grigoras, V-M Airaksinen, S. Franssila

Research output: Contribution to journal › Article › Scientific › peer-review

23 Citations (Scopus)

Original language	English
Journal	Nanotechnology
Publication status	Published - 2008
MoE publication type	A1 Journal article-refereed

Keywords

AAO
ALD
anodic alumina
step coverage

Cite this

@article{beeb80bd7f9d46c2a9bccfea806c1814,

title = "Coating of nanoporous membranes: atomic layer deposition versus sputtering",

keywords = "AAO, ALD, anodic alumina, step coverage, AAO, ALD, anodic alumina, step coverage, AAO, ALD, anodic alumina, step coverage",

author = "K. Grigoras and V-M Airaksinen and S. Franssila",

year = "2008",

language = "English",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing Ltd.",

}

TY - JOUR

T1 - Coating of nanoporous membranes: atomic layer deposition versus sputtering

AU - Grigoras, K.

AU - Airaksinen, V-M

AU - Franssila, S.

PY - 2008

Y1 - 2008

KW - AAO

KW - ALD

KW - anodic alumina

KW - step coverage

KW - AAO

KW - ALD

KW - anodic alumina

KW - step coverage

KW - AAO

KW - ALD

KW - anodic alumina

KW - step coverage

M3 - Article

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

ER -