Original language | English |
---|---|
Journal | Nanotechnology |
Publication status | Published - 2008 |
MoE publication type | A1 Journal article-refereed |
Keywords
- AAO
- ALD
- anodic alumina
- step coverage
K. Grigoras, V-M Airaksinen, S. Franssila
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Journal | Nanotechnology |
Publication status | Published - 2008 |
MoE publication type | A1 Journal article-refereed |