Coating of nanoporous membranes: atomic layer deposition versus sputtering

K. Grigoras, V-M Airaksinen, S. Franssila

    Research output: Contribution to journalArticleScientificpeer-review

    23 Citations (Scopus)
    Original languageEnglish
    JournalNanotechnology
    Publication statusPublished - 2008
    MoE publication typeA1 Journal article-refereed

    Keywords

    • AAO
    • ALD
    • anodic alumina
    • step coverage

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