Coating of nanoporous membranes atomic layer deposition versus sputtering

K. Grigoras, Sari Sirviö, V-M Airaksinen, S. Franssila

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationNanoSmat 2007, Algarve, Portugal 9-11 July
    Pages313-314
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

    Keywords

    • ALD
    • membrane
    • porous materials
    • sputtering

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