Projects per year
Abstract
Even though the recent progress made in complementary metal–oxide–semiconductor (CMOS) image sensors (CIS) has enabled numerous applications affecting our daily lives, the technology still relies on conventional methods such as antireflective coatings and ion-implanted back-surface field to reduce optical and electrical losses resulting in limited device performance. In this work, these methods are replaced with nanostructured surfaces and atomic layer deposited surface passivation. The results show that such surface nanoengineering applied to a commercial backside illuminated CIS significantly extends its spectral range and enhances its photosensitivity as demonstrated by >90% quantum efficiency in the 300–700 nm wavelength range. The surface nanoengineering also reduces the dark current by a factor of three. While the photoresponse uniformity of the sensor is seen to be slightly better, possible scattering from the nanostructures can lead to increased optical crosstalk between the pixels. The results demonstrate the vast potential of surface nanoengineering in improving the performance of CIS for a wide range of applications.
Original language | English |
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Article number | 2304001 |
Number of pages | 8 |
Journal | Small |
Volume | 19 |
Issue number | 47 |
Early online date | 2023 |
DOIs | |
Publication status | Published - 22 Nov 2023 |
MoE publication type | A1 Journal article-refereed |
Keywords
- antireflection coating
- black silicon
- complementary metal–oxide–semiconductor (CMOS) image sensors
- dark current
- quantum efficiency
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PREIN 2: Photonics Research and Innovation
Naukkarinen, O. (Principal investigator)
01/09/2022 → 31/12/2026
Project: Academy of Finland: Other research funding
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NIR: Super-sensitive ?/X- and NIR-radiation detectors via defect-free nanostructures: Next Imaging Revolution?
Vähänissi, V. (Principal investigator) & Savin, H. (Project Member)
01/09/2020 → 31/08/2024
Project: Academy of Finland: Other research funding
Equipment
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OtaNano - Nanomicroscopy Center
Seitsonen, J. (Manager) & Rissanen, A. (Other)
OtaNanoFacility/equipment: Facility