Circuit Simulation Model of Gas Damping in Microstructures with Nontrivial Geometries

T. Veijola, T. Ryhänen, H. Kuisma, J. Lahdenperä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    12 Citations (Scopus)
    Original languageEnglish
    Title of host publicationThe 8th Int. Conf. on Solid-State Sensors and Actuators
    Place of PublicationStockholm, Sverige
    PublisherEurosensors IX
    Pages36-40
    Publication statusPublished - 1995
    MoE publication typeA4 Article in a conference publication

    Keywords

    • accelerometer model
    • APLAC
    • circuit simulation
    • gas damping
    • squeeze film effect

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