Projects per year
Abstract
Multilayer thin-film structures are promising for many future high-tech applications. We investigate the structure of polycrystalline ZnO thin films with sub-nanometer amorphous inorganic (AlO x ) and organic (benzene) layers grown by atomic/molecular layer deposition. Small quantities of aluminium are typically introduced in ZnO films for doping, while one of the intended functions of the organic layers is to block thermal conductivity. We apply the AlO x and benzene layers both simultaneously and separately, and investigate the resultant superlattice films with transmission electron microscopy, x-ray reflectivity and x-ray diffraction measurements. The study reveals that both AlO x and benzene form distinct layers in the ZnO matrix even down to one atomic/molecular layer. Furthermore, we demonstrate that despite the clear layering, the ZnO grains can penetrate through thin (below ca. 2 nm) benzene and AlO x layers.
Original language | English |
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Article number | 025012 |
Number of pages | 7 |
Journal | Semiconductor Science and Technology |
Volume | 36 |
Issue number | 2 |
DOIs | |
Publication status | Published - 23 Dec 2020 |
MoE publication type | A1 Journal article-refereed |
Keywords
- atomic layer deposition
- inorganic-organic superlattice
- molecular layer deposition
- transmission electron microscopy
- x-ray reflectivity
- ZnO
Fingerprint
Dive into the research topics of 'Characterization of ZnO/AlO x/benzene thin-film heterostructures grown through atomic layer deposition/molecular layer deposition'. Together they form a unique fingerprint.Projects
- 2 Finished
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Novel hybrid materials by ALD/MLD: from fundamentals towards applications
Karppinen, M. (Principal investigator)
01/09/2016 → 31/08/2020
Project: Academy of Finland: Other research funding
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Molecular-Layer-Engineered Inorganic-Organic Hybrid Materials
Karppinen, M. (Principal investigator)
23/12/2013 → 31/01/2019
Project: EU: ERC grants
Equipment
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OtaNano - Nanomicroscopy Center
Seitsonen, J. (Manager) & Rissanen, A. (Other)
OtaNanoFacility/equipment: Facility
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Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical EngineeringFacility/equipment: Facility