@inproceedings{68f48f80488d4b13ad7eb23705eeea58,
title = "Characterization of YScO3 Thin Films Grown by ALD Using b-Diketonate and Organometallic Precursors",
keywords = "atomic layer deposition, rare earth scandates, yttrium scandium oxide, atomic layer deposition, rare earth scandates, yttrium scandium oxide, atomic layer deposition, rare earth scandates, yttrium scandium oxide",
author = "Pia Myllym{\"a}ki and Jaakko Niinist{\"o} and Matti Putkonen and Minna Nieminen and Lauri Niinist{\"o}",
year = "2005",
language = "English",
booktitle = "AVS 5th International Conference on Atomic Layer Deposition 2005, 8.-10.8.05, San Jose, California",
publisher = "American Vacuum Society",
address = "United States",
}