Characterization of vibration modes in piezoelectrically transduced MEMS resonators using laser interferometry

Olli Holmgren, Kimmo Kokkonen, Antti Jaakkola, S. Asmala, J. Dekker, A. Nurmela, Tuomas Pensala, T. Riekkinen, T. Mattila, Ari Alastalo, Matti Kaivola

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationThe XLIII Annual Conference of the Finnish Physical Society, Espoo, Finland, March 12-14, 2009
Pages15
Publication statusPublished - 2009
MoE publication typeA4 Article in a conference publication

Keywords

  • MEMS
  • resonator

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