Characterization of thin films for thickness non-uniformity

Sara Pourjamal, Henrik Mäntynen, Priit Jaanson, Farshid Manoocheri, Erkki Ikonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationNewrad 2014, Espoo, Finland, June 24-27, 2014
Place of PublicationFinland
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication

Cite this

Pourjamal, S., Mäntynen, H., Jaanson, P., Manoocheri, F., & Ikonen, E. (2014). Characterization of thin films for thickness non-uniformity. In Newrad 2014, Espoo, Finland, June 24-27, 2014