Characterization of thin films for thickness non-uniformity

Sara Pourjamal, Henrik Mäntynen, Priit Jaanson, Farshid Manoocheri, Erkki Ikonen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationNewrad 2014, Espoo, Finland, June 24-27, 2014
Place of PublicationFinland
Publication statusPublished - 2014
MoE publication typeA4 Conference publication

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