Characterization of thin film thickness

Sara Pourjamal, Henrik Mäntynen, Priit Jaanson, Dana Maria Rosu, Andreas Hertwig, Farshid Manoocheri, Erkki Ikonen

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)302-308
JournalMetrologia
Volume51
Issue number6
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

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