Characterization of thin film adhesion by MEMS shaft-loading blister testing

Research output: Contribution to journalArticle

Researchers

Research units

  • VTT Technical Research Centre of Finland

Details

Original languageEnglish
Article number031102
Pages (from-to)1-5
Number of pages5
JournalJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Volume31
Issue number3
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

    Research areas

  • adhesion, atomic layer deposition, shaft-loading blister test, thin films

Download statistics

No data available

ID: 876065