Characterization of thin film adhesion by MEMS shaft-loading blister testing

Maria Berdova, Jussi Lyytinen, Kestuti Grigoras, Anu Baby, Lauri Kilpi, Helena Ronkainen, Sami Franssila, Jari Koskinen

Department of Chemistry and Materials Science

VTT Technical Research Centre of Finland

Research output: Contribution to journal › Article › Scientific › peer-review

16 Citations (Scopus)

263 Downloads (Pure)

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OtaNano
Anna Rissanen (Manager)
Aalto University
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OtaNano - Nanofab
Päivikki Repo (Manager)
OtaNano
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Raw Materials Research Infrastructure
Maarit Karppinen (Manager)
School of Chemical Engineering
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