Characterization of thin film adhesion by MEMS shaft-loading blister testing

Maria Berdova; Jussi Lyytinen; Kestuti Grigoras; Anu Baby; Lauri Kilpi; Helena Ronkainen; Sami Franssila; Jari Koskinen

doi:10.1116/1.4801921

Characterization of thin film adhesion by MEMS shaft-loading blister testing

Maria Berdova, Jussi Lyytinen, Kestuti Grigoras, Anu Baby, Lauri Kilpi, Helena Ronkainen, Sami Franssila, Jari Koskinen

Department of Chemistry and Materials Science

VTT Technical Research Centre of Finland

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

324 Downloads (Pure)

Original language	English
Article number	031102
Pages (from-to)	1-5
Number of pages	5
Journal	JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Volume	31
Issue number	3
DOIs	https://doi.org/10.1116/1.4801921
Publication status	Published - 2013
MoE publication type	A1 Journal article-refereed

Keywords

adhesion
atomic layer deposition
shaft-loading blister test
thin films

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10.1116/1.4801921

Berdova_lyytinen-et al-10-1116-1-4801921Final published version, 1.26 MB

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@article{eb86f1561316487f9ace4adc7f492334,

title = "Characterization of thin film adhesion by MEMS shaft-loading blister testing",

keywords = "adhesion, atomic layer deposition, shaft-loading blister test, thin films, adhesion, atomic layer deposition, shaft-loading blister test, thin films, adhesion, atomic layer deposition, shaft-loading blister test, thin films",

author = "Maria Berdova and Jussi Lyytinen and Kestuti Grigoras and Anu Baby and Lauri Kilpi and Helena Ronkainen and Sami Franssila and Jari Koskinen",

year = "2013",

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language = "English",

volume = "31",

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issn = "0734-2101",

publisher = "American Institute of Physics",

number = "3",

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T1 - Characterization of thin film adhesion by MEMS shaft-loading blister testing

AU - Berdova, Maria

AU - Lyytinen, Jussi

AU - Grigoras, Kestuti

AU - Baby, Anu

AU - Kilpi, Lauri

AU - Ronkainen, Helena

AU - Franssila, Sami

AU - Koskinen, Jari

PY - 2013

Y1 - 2013

KW - adhesion

KW - atomic layer deposition

KW - shaft-loading blister test

KW - thin films

KW - adhesion

KW - atomic layer deposition

KW - shaft-loading blister test

KW - thin films

KW - adhesion

KW - atomic layer deposition

KW - shaft-loading blister test

KW - thin films

UR - http://dx.doi.org/10.1116/1.4801921

U2 - 10.1116/1.4801921

DO - 10.1116/1.4801921

M3 - Article

SN - 0734-2101

VL - 31

SP - 1

EP - 5

JO - JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A

JF - JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A

IS - 3

M1 - 031102

ER -

Characterization of thin film adhesion by MEMS shaft-loading blister testing

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Characterization of thin film adhesion by MEMS shaft-loading blister testing

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