Characterization of thin film adhesion by MEMS shaft-loading blister testing

Maria Berdova, Jussi Lyytinen, Kestuti Grigoras, Anu Baby, Lauri Kilpi, Helena Ronkainen, Sami Franssila, Jari Koskinen

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)
192 Downloads (Pure)
Original languageEnglish
Article number031102
Pages (from-to)1-5
Number of pages5
JournalJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Volume31
Issue number3
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

Keywords

  • adhesion
  • atomic layer deposition
  • shaft-loading blister test
  • thin films

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