Characterization of the Interface and Intermediate Layes of TiN/Ti/Substrate Systems

E. Ristolainen, K.A. Pischow

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)211-212
    JournalMicron and Microscopica Acta
    Volume23
    Issue number1/2
    Publication statusPublished - 1992
    MoE publication typeA1 Journal article-refereed

    Cite this