Characterization of the interface and intermediate layers of TiN/Ti/Substrate systems

K. Pischow

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)211-212
    JournalMicron and Microscopica Acta
    Volume23
    Issue number1/2
    Publication statusPublished - 1992
    MoE publication typeA1 Journal article-refereed

    Keywords

    • TiN
    • titanium

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