Characterization of the interface and intermediate layers of TiN/Ti/Substrate systems

K. Pischow

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	211-212
Journal	Micron and Microscopica Acta
Volume	23
Issue number	1/2
Publication status	Published - 1992
MoE publication type	A1 Journal article-refereed

Keywords

@article{80b229d71aa84439a686aed24aa750eb,

title = "Characterization of the interface and intermediate layers of TiN/Ti/Substrate systems",

keywords = "TiN, titanium, TiN, titanium, TiN, titanium",

author = "K. Pischow",

year = "1992",

language = "English",

volume = "23",

pages = "211--212",

journal = "Micron and Microscopica Acta",

number = "1/2",

}