Characterization of the feature-size dependence in Ar/C12 chemically assisted ion beam etching of InP-based photonic crystal devices

A. Berrier, M. Mulot, G. Malm, M. Ostling, S. Anand, A. Talneuau, R. Farrini, R. Houdre

    Research output: Contribution to journalArticleScientificpeer-review

    21 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1-10
    JournalJournal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
    Issue number1
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed


    • fotonikide
    • indiumfosfidi
    • nanotekniikka

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