Characterization of the feature-size dependence in Ar/C12 chemically assisted ion beam etching of InP-based photonic crystal devices

A. Berrier; M. Mulot; G. Malm; M. Ostling; S. Anand; A. Talneuau; R. Farrini; R. Houdre

Characterization of the feature-size dependence in Ar/C12 chemically assisted ion beam etching of InP-based photonic crystal devices

A. Berrier, M. Mulot, G. Malm, M. Ostling, S. Anand, A. Talneuau, R. Farrini, R. Houdre

Research output: Contribution to journal › Article › Scientific › peer-review

21 Citations (Scopus)

Original language	English
Pages (from-to)	1-10
Journal	Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
Volume	25
Issue number	1
Publication status	Published - 2007
MoE publication type	A1 Journal article-refereed

Keywords

fotonikide
indiumfosfidi
nanotekniikka

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title = "Characterization of the feature-size dependence in Ar/C12 chemically assisted ion beam etching of InP-based photonic crystal devices",

keywords = "fotonikide, indiumfosfidi, nanotekniikka, fotonikide, indiumfosfidi, nanotekniikka, fotonikide, indiumfosfidi, nanotekniikka",

author = "A. Berrier and M. Mulot and G. Malm and M. Ostling and S. Anand and A. Talneuau and R. Farrini and R. Houdre",

year = "2007",

language = "English",

volume = "25",

pages = "1--10",

journal = "Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "American Institute of Physics",

number = "1",

}

Characterization of the feature-size dependence in Ar/C12 chemically assisted ion beam etching of InP-based photonic crystal devices. / Berrier, A.; Mulot, M.; Malm, G. et al.
In: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, Vol. 25, No. 1, 2007, p. 1-10.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Characterization of the feature-size dependence in Ar/C12 chemically assisted ion beam etching of InP-based photonic crystal devices

AU - Berrier, A.

AU - Mulot, M.

AU - Malm, G.

AU - Ostling, M.

AU - Anand, S.

AU - Talneuau, A.

AU - Farrini, R.

AU - Houdre, R.

PY - 2007

Y1 - 2007

KW - fotonikide

KW - indiumfosfidi

KW - nanotekniikka

KW - fotonikide

KW - indiumfosfidi

KW - nanotekniikka

KW - fotonikide

KW - indiumfosfidi

KW - nanotekniikka

M3 - Article

SN - 1071-1023

VL - 25

SP - 1

EP - 10

JO - Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

IS - 1

ER -