Characterization of the Acoustical Behaviour of a Thin Film BAW Resonator via Interferometric Measurements

Kimmo Kokkonen, Tuomas Pensala

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationFysiikan Päivät 2007, Tallinna, 15.-17.3.2007
EditorsR. Vainio, J. Pomoell J., M. Louhivuori
Place of PublicationHelsinki
PublisherUniversity of Helsinki, Department of Physical Sciences
Pages334
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication

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