Characterization of PillarHall test chip structures using a reflectometry technique

Aleksandr Danilenko^*, Masoud Rastgou, Farshid Manoocheri, Jussi Kinnunen, Virpi Korpelainen, Antti Lassila, Erkki Ikonen

^*Corresponding author for this work

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ATMOC (EMPIR): Traceable metrology of soft-X-ray to IR optical constants and nanofilms for advanced manufacturing
Manoocheri, F., Danilenko, A., Rastgou, M. & Peltoniemi, J.
01/07/2021 → 30/06/2024
Project: EU other competitive funding (ERA-NET, EURAMET, EUREKA, EU JU)
PREIN: Photonics Research and Innovation
Mäkelä, K.
01/01/2019 → 31/12/2022
Project: Academy of Finland: Other research funding