Characterization of Diffraction Gratings in a Rigorous Domain with Optical Scatterometry: Hierarchical Neural-Network Model

Ilkka Kallioniemi, J. Saarinen, Erkki Oja

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)
Original languageEnglish
Pages (from-to)5920-5930
JournalApplied Optics
Volume38
Issue number28
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed

Keywords

  • diffraction gratings
  • inverse problems
  • neural networks

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