Characterization of denuded zones in internally gettered silicon wafers by electron beam induced current measurements

Antti Haarahiltunen, H Väinolä, M Yli-Koski, R Ruotsalainen, E Saarnilehto, S Kaarlela, E Haimi, J. Sinkkonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThirteenth International Conference on Microscopy of Semiconducting Materials, Cambridge, England, 31.3-4.3.2003
    EditorsA.G. Cullis, P.A. Midgley
    Publication statusPublished - 2003
    MoE publication typeA4 Article in a conference publication

    Publication series

    ISSN (Print)0951-3248

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