Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Kristina Bespalova
, Elmeri österlund
, Glenn Ross
, Mervi Paulasto-Kröckel
, Abhilash Thanniyil Sebastian
, Cyril Baby Karuthedath
, Stefan Mertin
, Tuomas Pensala

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

207 Downloads (Pure)

1 results

Finished
POSITION-II: A pilot line for the next generation of smart catheters and implants
Paulasto-Kröckel, M. (Principal investigator), Bespalova, K. (Project Member), Kaaos, J. (Project Member), Dong, H. (Project Member), Vuorinen, V. (Project Member) & Österlund, E. (Project Member)
01/06/2018 → 31/05/2021
Project: Business Finland: Other research funding