Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Kristina Bespalova, Elmeri österlund, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, Tuomas Pensala

Research output: Contribution to journal › Article › Scientific › peer-review

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POSITION-II: A pilot line for the next generation of smart catheters and implants
Paulasto-Kröckel, M., Bespalova, K., Österlund, E., Dong, H., Kaaos, J. & Vuorinen, V.
01/06/2018 → 31/05/2021
Project: Business Finland: Other research funding