Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Kristina Bespalova, Elmeri österlund, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, Tuomas Pensala

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
107 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication'. Together they form a unique fingerprint.

Engineering & Materials Science