Equipment
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Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication
Kristina Bespalova, Elmeri österlund, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, Tuomas Pensala
Research output: Contribution to journal › Article › Scientific › peer-review
7
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